For CD/DVD mastering, after the LBR process, the recorded resist master is transferred to the Developer Unit. At this station the recorded resist master is rinsed and developed. The Developer Unit consist of:
•PROCESS BOWL: Houses the substrate rotation table and drain for waste chemicals and water
•MOVEABLE DISPENSING ARM & HEAD: Used for dispensing the developer solution and pure water individually.
•ROTATION TABLE: Used for supporting the substrate and rotating it with variable speed.
•ROTATION MECHANISMS: Used for moving the drying and dispensing units.
•FLUSHING DRAIN: Used to contain residual fluids dripping from the dispensing tubes when the arm is at the default position
•MOVEABLE DRYING UNIT: Houses UV lamps to expose any residual photo-resist so that it does not adhere to subsequent stampers on separation and helps to minimize residual photo-resist transferring to the stamper.
