Sputtering System
| Sputter deposition is a technique used to deposit thin films by sputtering a block of source material “target”, onto a surface “substrate”. | |||||
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Sputtered atoms ejected into the gas phase are not in their thermodynamic equilibrium state, and tend to deposit on all surfaces in the vacuum chamber. A glass substrate placed in the chamber will be coated with a thin film. Sputtering uses argon plasma. ![]() |
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| The CD/DVD mastering ATC-B-2436 handles one rotating substrate at a time and employs a single rotating magnetron for optimum uniformity. | ![]() |
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